“Rotating” steps in Si(0 0 1) homoepitaxy
Steps on Si(0 0 1) surfaces which are initially not aligned along the high symmetry directions of the dimer reconstruction are observed, by scanning tunneling microscopy, to “rotate” toward [1 1 0] directions during Si growth. This step “rotation” occurs due to a faceting of the step edges. A theore...
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Veröffentlicht in: | ENR 2004-01, Vol.549 (1), p.31-36 |
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Hauptverfasser: | , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | Steps on Si(0
0
1) surfaces which are initially not aligned along the high symmetry directions of the dimer reconstruction are observed, by scanning tunneling microscopy, to “rotate” toward [1
1
0] directions during Si growth. This step “rotation” occurs due to a faceting of the step edges. A theoretical analysis of adatom incorporation into the steps shows that this kinetic instability may be caused by a suppressed mobility of the growing species along the
S
A step edge. |
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ISSN: | 0039-6028 0891-9526 1879-2758 |
DOI: | 10.1016/j.susc.2003.11.033 |