Low-pressure RF discharge in the free-flight regime

The self-consistent equations system for low-pressure RF discharge in the free-flight regime is formulated. The expressions for the electron energy diffusion coefficient due to electron-neutral collisions and to the electron collisions with the plasma-space charge moving boundary (stochastic heating...

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Veröffentlicht in:	IEEE transactions on plasma science 1992-04, Vol.20 (2), p.86-92
Hauptverfasser:	Kaganovich, I.D., Tsendin, L.D.
Format:	Artikel
Sprache:	eng
Schlagworte:	Distribution functions Electric discharges Electrons Equations Exact sciences and technology Heating Kinetic theory Nonuniform electric fields Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges Plasma density Plasma sheaths Radio frequency Stochastic processes
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