Preparation of potassium tantalate thin films through chemical solution deposition

Potassium tantalate (KT) KTaO 3 thin films of both pyrochlore and perovskite cubic structures were prepared through the chemical solution deposition (CSD). A homogeneous and stable precursor solution was obtained from potassium iso-butoxide and tantalum iso-butoxide in absolute iso-butanol with an a...

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Veröffentlicht in:Journal of the European Ceramic Society 2004, Vol.24 (2), p.455-462
Hauptverfasser: Buršı́k, J, Drbohlav, I, Vaněk, P, Železný, V
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Sprache:eng
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Zusammenfassung:Potassium tantalate (KT) KTaO 3 thin films of both pyrochlore and perovskite cubic structures were prepared through the chemical solution deposition (CSD). A homogeneous and stable precursor solution was obtained from potassium iso-butoxide and tantalum iso-butoxide in absolute iso-butanol with an additive of diethanolamine as a stabilizer. The effects of K:Ta sol stoichiometry, type of substrate (both amorphous, and single crystal substrates), type of buffer interlayer [Al 2O 3, Y-stabilized ZrO 2(YSZ), PbTiO 3, PbTiO 3–Al 2O 3 composite, KNbO 3 (KN)], and annealing regime on the kinetics of pyrochlore to perovskite transition has been studied. KT perovskite films have been successfully prepared on (100)MgO, and (0001)Al 2O 3. Using SiO 2 and Si substrates, perovskite films have been obtained via insertion of Al 2O 3 and KNbO 3 buffer layers.
ISSN:0955-2219
1873-619X
DOI:10.1016/S0955-2219(03)00206-1