Preparation of potassium tantalate thin films through chemical solution deposition
Potassium tantalate (KT) KTaO 3 thin films of both pyrochlore and perovskite cubic structures were prepared through the chemical solution deposition (CSD). A homogeneous and stable precursor solution was obtained from potassium iso-butoxide and tantalum iso-butoxide in absolute iso-butanol with an a...
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Veröffentlicht in: | Journal of the European Ceramic Society 2004, Vol.24 (2), p.455-462 |
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Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext |
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Zusammenfassung: | Potassium tantalate (KT) KTaO
3 thin films of both pyrochlore and perovskite cubic structures were prepared through the chemical solution deposition (CSD). A homogeneous and stable precursor solution was obtained from potassium iso-butoxide and tantalum iso-butoxide in absolute iso-butanol with an additive of diethanolamine as a stabilizer. The effects of K:Ta sol stoichiometry, type of substrate (both amorphous, and single crystal substrates), type of buffer interlayer [Al
2O
3, Y-stabilized ZrO
2(YSZ), PbTiO
3, PbTiO
3–Al
2O
3 composite, KNbO
3 (KN)], and annealing regime on the kinetics of pyrochlore to perovskite transition has been studied. KT perovskite films have been successfully prepared on (100)MgO, and (0001)Al
2O
3. Using SiO
2 and Si substrates, perovskite films have been obtained via insertion of Al
2O
3 and KNbO
3 buffer layers. |
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ISSN: | 0955-2219 1873-619X |
DOI: | 10.1016/S0955-2219(03)00206-1 |