Micromachined microwave transmission lines in CMOS technology

Coplanar waveguides were designed and fabricated through a commercial CMOS process with post-processing micromachining. The transmission-line layouts were designed with commercial computer-aided design (CAD) tools. Integrated circuits (ICs) were fabricated through the MOSIS service, and subsequently...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	IEEE transactions on microwave theory and techniques 1997-05, Vol.45 (5), p.630-635
Hauptverfasser:	Milanovic, V., Gaitan, M., Bowen, E.D., Zaghloul, M.E.
Format:	Artikel
Sprache:	eng
Schlagworte:	CMOS technology Coplanar transmission lines Design automation Distributed parameter circuits Etching Frequency Integrated circuit technology Micromachining Microwave technology Transmission lines
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!