Large tilt angle electrostatic force actuated micro-mirror
A large-angle electrostatic force actuated two-axis rotational micro-mirror has been proposed and demonstrated. A built-in air gap has been introduced in between the mirror and the bottom electrode to provide sufficient space for the rotation of the mirror. As a result, a large tilt angle has been a...
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| Veröffentlicht in: | IEEE photonics technology letters 2002-11, Vol.14 (11), p.1569-1571 |
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| container_end_page | 1571 |
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| container_issue | 11 |
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| container_title | IEEE photonics technology letters |
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| creator | Kim, Tae-Sik Lee, Sang-Shin Yee, Youngjoo Bu, Jong-Uk Park, Chil-Geun Ha, Man-Hyo |
| description | A large-angle electrostatic force actuated two-axis rotational micro-mirror has been proposed and demonstrated. A built-in air gap has been introduced in between the mirror and the bottom electrode to provide sufficient space for the rotation of the mirror. As a result, a large tilt angle has been achieved without using additional actuators. The gap was produced in such a way that the grounded mirror plate and the bottom electrode were made separately in different substrates and then combined. The measured tilt angles were as large as /spl plusmn/7.5/spl deg/ and /spl plusmn/6.4/spl deg/ in the x and y direction, and the pull-in voltages for the two axes were approximately 100 V. The micro-mirror was successfully used to steer an optical beam. |
| doi_str_mv | 10.1109/LPT.2002.803913 |
| format | Article |
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A built-in air gap has been introduced in between the mirror and the bottom electrode to provide sufficient space for the rotation of the mirror. As a result, a large tilt angle has been achieved without using additional actuators. The gap was produced in such a way that the grounded mirror plate and the bottom electrode were made separately in different substrates and then combined. The measured tilt angles were as large as /spl plusmn/7.5/spl deg/ and /spl plusmn/6.4/spl deg/ in the x and y direction, and the pull-in voltages for the two axes were approximately 100 V. The micro-mirror was successfully used to steer an optical beam.</description><identifier>ISSN: 1041-1135</identifier><identifier>EISSN: 1941-0174</identifier><identifier>DOI: 10.1109/LPT.2002.803913</identifier><identifier>CODEN: IPTLEL</identifier><language>eng</language><publisher>New York: IEEE</publisher><subject>Actuators ; Beams (radiation) ; Camber ; Capacitive sensors ; Electric potential ; Electrodes ; Electrostatic actuators ; Electrostatics ; Fasteners ; Large-scale systems ; Mirrors ; Optical beams ; Optical switches ; Substrates ; Tilt ; Voltage ; Wavelength division multiplexing</subject><ispartof>IEEE photonics technology letters, 2002-11, Vol.14 (11), p.1569-1571</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2002</rights><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c380t-af9556b3cd9fdc696de23a88e5e8e02a511dc7c4c2bf193e1aba6f15a184e3f23</citedby><cites>FETCH-LOGICAL-c380t-af9556b3cd9fdc696de23a88e5e8e02a511dc7c4c2bf193e1aba6f15a184e3f23</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/1042005$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,780,784,796,27924,27925,54758</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/1042005$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Kim, Tae-Sik</creatorcontrib><creatorcontrib>Lee, Sang-Shin</creatorcontrib><creatorcontrib>Yee, Youngjoo</creatorcontrib><creatorcontrib>Bu, Jong-Uk</creatorcontrib><creatorcontrib>Park, Chil-Geun</creatorcontrib><creatorcontrib>Ha, Man-Hyo</creatorcontrib><title>Large tilt angle electrostatic force actuated micro-mirror</title><title>IEEE photonics technology letters</title><addtitle>LPT</addtitle><description>A large-angle electrostatic force actuated two-axis rotational micro-mirror has been proposed and demonstrated. A built-in air gap has been introduced in between the mirror and the bottom electrode to provide sufficient space for the rotation of the mirror. As a result, a large tilt angle has been achieved without using additional actuators. The gap was produced in such a way that the grounded mirror plate and the bottom electrode were made separately in different substrates and then combined. The measured tilt angles were as large as /spl plusmn/7.5/spl deg/ and /spl plusmn/6.4/spl deg/ in the x and y direction, and the pull-in voltages for the two axes were approximately 100 V. The micro-mirror was successfully used to steer an optical beam.</description><subject>Actuators</subject><subject>Beams (radiation)</subject><subject>Camber</subject><subject>Capacitive sensors</subject><subject>Electric potential</subject><subject>Electrodes</subject><subject>Electrostatic actuators</subject><subject>Electrostatics</subject><subject>Fasteners</subject><subject>Large-scale systems</subject><subject>Mirrors</subject><subject>Optical beams</subject><subject>Optical switches</subject><subject>Substrates</subject><subject>Tilt</subject><subject>Voltage</subject><subject>Wavelength division multiplexing</subject><issn>1041-1135</issn><issn>1941-0174</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2002</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNqFkb1PwzAUxC0EEqUwM7BEDDCl9fNHYrOhii8pEgxltlznpUqVNMV2Bv57XJUBMcD0bvjdSe-OkEugMwCq59XbcsYoZTNFuQZ-RCagBeQUSnGcNE0agMtTchbChlIQkosJuausX2MW2y5mdrvuMMMOXfRDiDa2LmsG7zCzLo42Yp31rfND3rfeD_6cnDS2C3jxfafk_fFhuXjOq9enl8V9lTuuaMxto6UsVtzVuqldoYsaGbdKoUSFlFkJULvSCcdWDWiOYFe2aEBaUAJ5w_iU3B5yd374GDFE07fBYdfZLQ5jMJqWWha0lIm8-ZNkivOCSf4_WKYmBdUJvP4FbobRb9O7RikhBFV6nzY_QKmbEDw2Zufb3vpPA9TstzFpG7Pfxhy2SY6rg6NFxB-0SJDkXxPtiWI</recordid><startdate>20021101</startdate><enddate>20021101</enddate><creator>Kim, Tae-Sik</creator><creator>Lee, Sang-Shin</creator><creator>Yee, Youngjoo</creator><creator>Bu, Jong-Uk</creator><creator>Park, Chil-Geun</creator><creator>Ha, Man-Hyo</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>RIA</scope><scope>RIE</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8FD</scope><scope>L7M</scope><scope>H8D</scope><scope>F28</scope><scope>FR3</scope></search><sort><creationdate>20021101</creationdate><title>Large tilt angle electrostatic force actuated micro-mirror</title><author>Kim, Tae-Sik ; Lee, Sang-Shin ; Yee, Youngjoo ; Bu, Jong-Uk ; Park, Chil-Geun ; Ha, Man-Hyo</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c380t-af9556b3cd9fdc696de23a88e5e8e02a511dc7c4c2bf193e1aba6f15a184e3f23</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2002</creationdate><topic>Actuators</topic><topic>Beams (radiation)</topic><topic>Camber</topic><topic>Capacitive sensors</topic><topic>Electric potential</topic><topic>Electrodes</topic><topic>Electrostatic actuators</topic><topic>Electrostatics</topic><topic>Fasteners</topic><topic>Large-scale systems</topic><topic>Mirrors</topic><topic>Optical beams</topic><topic>Optical switches</topic><topic>Substrates</topic><topic>Tilt</topic><topic>Voltage</topic><topic>Wavelength division multiplexing</topic><toplevel>online_resources</toplevel><creatorcontrib>Kim, Tae-Sik</creatorcontrib><creatorcontrib>Lee, Sang-Shin</creatorcontrib><creatorcontrib>Yee, Youngjoo</creatorcontrib><creatorcontrib>Bu, Jong-Uk</creatorcontrib><creatorcontrib>Park, Chil-Geun</creatorcontrib><creatorcontrib>Ha, Man-Hyo</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>Aerospace Database</collection><collection>ANTE: Abstracts in New Technology & Engineering</collection><collection>Engineering Research Database</collection><jtitle>IEEE photonics technology letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Kim, Tae-Sik</au><au>Lee, Sang-Shin</au><au>Yee, Youngjoo</au><au>Bu, Jong-Uk</au><au>Park, Chil-Geun</au><au>Ha, Man-Hyo</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Large tilt angle electrostatic force actuated micro-mirror</atitle><jtitle>IEEE photonics technology letters</jtitle><stitle>LPT</stitle><date>2002-11-01</date><risdate>2002</risdate><volume>14</volume><issue>11</issue><spage>1569</spage><epage>1571</epage><pages>1569-1571</pages><issn>1041-1135</issn><eissn>1941-0174</eissn><coden>IPTLEL</coden><abstract>A large-angle electrostatic force actuated two-axis rotational micro-mirror has been proposed and demonstrated. A built-in air gap has been introduced in between the mirror and the bottom electrode to provide sufficient space for the rotation of the mirror. As a result, a large tilt angle has been achieved without using additional actuators. The gap was produced in such a way that the grounded mirror plate and the bottom electrode were made separately in different substrates and then combined. The measured tilt angles were as large as /spl plusmn/7.5/spl deg/ and /spl plusmn/6.4/spl deg/ in the x and y direction, and the pull-in voltages for the two axes were approximately 100 V. The micro-mirror was successfully used to steer an optical beam.</abstract><cop>New York</cop><pub>IEEE</pub><doi>10.1109/LPT.2002.803913</doi><tpages>3</tpages></addata></record> |
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| identifier | ISSN: 1041-1135 |
| ispartof | IEEE photonics technology letters, 2002-11, Vol.14 (11), p.1569-1571 |
| issn | 1041-1135 1941-0174 |
| language | eng |
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| source | IEEE Electronic Library (IEL) |
| subjects | Actuators Beams (radiation) Camber Capacitive sensors Electric potential Electrodes Electrostatic actuators Electrostatics Fasteners Large-scale systems Mirrors Optical beams Optical switches Substrates Tilt Voltage Wavelength division multiplexing |
| title | Large tilt angle electrostatic force actuated micro-mirror |
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