New Adaptive Mode of Operation for MEMS Gyroscopes

This paper presents a new adaptive operation strategy that can identify and, in an adaptive fashion, compensate for most fabrication defects and perturbations affecting the behavior of a MEMS z-axis gyroscope. The convergence and resolution analysis presented in the paper shows that the proposed ada...

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Veröffentlicht in:Journal of dynamic systems, measurement, and control measurement, and control, 2004-12, Vol.126 (4), p.800-810
Hauptverfasser: Park, Sungsu, Horowitz, Roberto
Format: Artikel
Sprache:eng
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Zusammenfassung:This paper presents a new adaptive operation strategy that can identify and, in an adaptive fashion, compensate for most fabrication defects and perturbations affecting the behavior of a MEMS z-axis gyroscope. The convergence and resolution analysis presented in the paper shows that the proposed adaptive controlled scheme offers several advantages over conventional modes of operation. These advantages include a larger operational bandwidth, absence of zero-rate output, self-calibration and a large robustness to parameter variations, which are caused by fabrication defects and ambient conditions.
ISSN:0022-0434
1528-9028
DOI:10.1115/1.1849252