Plasma immersion ion implantation of poly(tetrafluoroethylene)

Plasma immersion ion implantation (PIII) has been used with a filtered cathodic arc to implant copper and carbon ions into poly(tetrafluoroethylene) (PTFE). The PTFE substrates for the copper implantation were placed perpendicular to the plasma beam, whilst those for carbon implantation were oriente...

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Veröffentlicht in:Surface & coatings technology 2004-01, Vol.177, p.483-488
Hauptverfasser: Schiller, T.L., Sheeja, D., McKenzie, D.R., McCulloch, D.G., Lau, D.S.P., Burn, S., Tay, B.K.
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Sprache:eng
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