Influence of zigzag microstructure on mechanical and electrical properties of chromium multilayered thin films

Chromium thin films exhibiting a columnar microstructure have been prepared by d.c. magnetron sputtering. The glancing angle deposition (GLAD) technique and the substrate motion have been implemented to sculpt this typical columnar microstructure into desired zigzag shapes. By changing the direction...

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Veröffentlicht in:	Surface & coatings technology 2004-03, Vol.180, p.26-32
Hauptverfasser:	Lintymer, J., Martin, N., Chappé, J.-M., Delobelle, P., Takadoum, J.
Format:	Artikel
Sprache:	eng
Schlagworte:	Chromium Microstructure Roughness Zigzag multilayer
Online-Zugang:	Volltext
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