Design, fabrication, and testing of an electrohydrodynamic ion-drag micropump

This paper presents the design, fabrication, and testing of a novel electrohydrodynamic (EHD) ion-drag micropump. In order to maximize the electrical field gradients that are responsible for EHD pumping, we incorporated three-dimensional (3-D) triangular bumps of solder as part of the EHD electrodes...

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Veröffentlicht in:	Journal of microelectromechanical systems 2002-12, Vol.11 (6), p.684-690
Hauptverfasser:	Darabi, J., Rada, M., Ohadi, M., Lawler, J.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Design engineering Electrodes Electrohydrodynamics Exact sciences and technology Fabrication Fluid dynamics Fluid flow Fluids Mechanical engineering. Machine design Micropumps Niobium Optical films Precision engineering, watch making Pumping Pumps Solders Sputter etching Substrates Testing
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