Underwater and water-assisted laser processing: Part 2—Etching, cutting and rarely used methods

In the second part of the article, the subtractive processes—laser etching and cutting—in the presence of liquid water will be reviewed; but the rarely used methods of water assisted/underwater laser processing, such as welding, silicon wafer breaking, surface modification of polymers, pulsed laser...

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Veröffentlicht in:Optics and lasers in engineering 2004-02, Vol.41 (2), p.329-352
1. Verfasser: Kruusing, Arvi
Format: Artikel
Sprache:eng
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