Micromachined silicon force sensor based on diffractive optical encoders for characterization of microinjection

We present a micrograting-based force sensor integrated with a surface micromachined silicon-nitride probe for penetration and injection into Drosophila embryos. The probe is supported by springs of a known spring constant, and the penetration force is determined from displacement measurements using...

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Veröffentlicht in:	Sensors and actuators. A. Physical. 2004-09, Vol.114 (2), p.197-203
Hauptverfasser:	Zhang, X.J., Zappe, S., Bernstein, R.W., Sahin, O., Chen, C.-C., Fish, M., Scott, M.P., Solgaard, O.
Format:	Artikel
Sprache:	eng
Schlagworte:	Drosophila Drosophila embryo Force sensor MEMS optical encoder Microinjection
Online-Zugang:	Volltext
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