State-of-the-Art of Thermo-Mechanical Characterization of Thin Polymer Films

In microelectronic industry, thin polymer layers are one of the more commonly used product constituents. Examples are glue layers, coatings, and dielectric layers. The thicknesses of these films vary from a few tens of nanometers to over a hundred micrometers. Since at film thicknesses below 100nm t...

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Veröffentlicht in:	Journal of electronic packaging 2005-12, Vol.127 (4), p.530-536
Hauptverfasser:	Jansen, K. M. B, Gonda, V, Ernst, L. J, Bressers, H. J. L, Zhang, G. Q
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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