Deposition and mechanical evaluation of superhard Ti–Al–Si–N nanocomposite films by a hybrid coating system

New superhard TiAlSiN films, characterized by a nanocomposite comprising nano-sized (Ti,Al,Si)N crystallites embedded in amorphous Si 3N 4 matrix, could be successfully synthesized on WCCo substrates by a hybrid coating system of arc ion plating (AIP) and sputtering method. The hardness and Youn...

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Veröffentlicht in:	Thin solid films 2004-01, Vol.447 (Complete), p.443-448
Hauptverfasser:	Park, In-Wook, Choi, Sung Ryong, Suh, Ju Hyung, Park, Chan-Gyung, Kim, Kwang Ho
Format:	Artikel
Sprache:	eng
Schlagworte:	Hybrid coating system Mechanical evaluation Nanocomposite Superhard Ti–Al–Si–N
Online-Zugang:	Volltext
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