Direct Growth of SiC Nanorods on Si Using APCVD and Single Precursors

SiC nanorod was grown by APCVD using TMS. Grown SiC nanorods had a 10 ~ 60nm diameters and lengths of several micrometers. Nanorod.s diameters and lengths were different by kind of catalysts. Nanorod.s growth scheme was divided by two regions with diameter.s variations. At first region, nanorod was...

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Veröffentlicht in:	Materials science forum 2004-01, Vol.449-452, p.701-704
Hauptverfasser:	Rho, Daeho, Kim, Jae Soo, Yang, Jae Woong, Byun, Dong Jin, Jhin, Jung Geun, Kim, Nari
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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