Compositional dependence of the properties of ferroelectric Pb(ZrxTi1-x)O3 thin film capacitors deposited on single-layered PtRhOy electrode barriers

Single-layered PtRhOy thin films were investigated as electrode barriers for ferroelectric Pb(ZrxTi1-x)O3 (PZT) (x = 0.2-0.8) thin film capacitors. PtRhOy thin films were deposited directly on n+ Si wafers by reactive sputtering. PtRhOy/PZT/PtRhOy/n+ Si capacitors showed well-defined P-E hysteresis...

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Veröffentlicht in:	Ceramics international 2004, Vol.30 (7), p.1543-1546
Hauptverfasser:	Lee, Kwang Bae, Lee, Kyung Haeng, Ju, Byeong Kwon
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Capacitors. Resistors. Filters Electrical engineering. Electrical power engineering Exact sciences and technology Various equipment and components
Online-Zugang:	Volltext
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