Extraction of optical constants of zinc oxide thin films by ellipsometry with various models

Spectroscopic ellipsometry was used to extract the optical constants of zinc oxide (ZnO) thin films deposited on (100) silicon substrate by filtered cathodic vacuum arc technique. Three dispersion models, namely, Sellmeier dispersion model, Cauchy model and Forouhi–Bloomer model, were evaluated for...

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Veröffentlicht in:	Thin solid films 2006-07, Vol.510 (1), p.32-38
Hauptverfasser:	Liu, Y.C., Hsieh, J.H., Tung, S.K.
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Exact sciences and technology Optical constants Optical constants: refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Optical properties of bulk materials and thin films Physics Zinc oxide
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