Regularization techniques for 3D surface reconstruction from four quadrant backscattered electron detector images

In scanning electron microscopy (SEM), a four quadrants backscattered electron detector (FQBSD) provides signals that can be combined to obtain a tridimensional reconstruction of the surface. The main challenge of the reconstruction operation consists of integrating the gradient field obtained as th...

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Veröffentlicht in:	Ultramicroscopy 2023-08, Vol.250, p.113746-113746, Article 113746
Hauptverfasser:	Giardino, Matteo, Menon, Devanarayanan Meena Narayana, Janner, Davide Luca
Format:	Artikel
Sprache:	eng
Schlagworte:	Backscattered electrons Scanning electron microscopy Surface reconstruction Surface regularization
Online-Zugang:	Volltext
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