Role of hydrogen plasma on electrical and optical properties of ZGO, ITO and IZO transparent and conductive coatings

In this paper we study the electro-optical behaviour and the structure of different TCOs, namely the ZGO, ITO and IZO films before and after being submitted to different hydrogen plasma power densities, for times up to 60 s, aiming their use in a/nc-Si:H solar cells. The results achieved show that Z...

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Veröffentlicht in:Thin solid films 2006-07, Vol.511 (Complete), p.295-298
Hauptverfasser: Raniero, L., Ferreira, I., Pimentel, A., Gonçalves, A., Canhola, P., Fortunato, E., Martins, R.
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container_end_page 298
container_issue Complete
container_start_page 295
container_title Thin solid films
container_volume 511
creator Raniero, L.
Ferreira, I.
Pimentel, A.
Gonçalves, A.
Canhola, P.
Fortunato, E.
Martins, R.
description In this paper we study the electro-optical behaviour and the structure of different TCOs, namely the ZGO, ITO and IZO films before and after being submitted to different hydrogen plasma power densities, for times up to 60 s, aiming their use in a/nc-Si:H solar cells. The results achieved show that ZGO films do not reduce for all plasma conditions used and so, the solar cells produced evidence high current density, about 17% larger that the one recorded in the other TCOs. Besides that, by combining the electrical and optical characteristics of the films through a figure of merit, the data reveal that for the ITO and IZO films even when exposed to very low hydrogen power plasma, the figure of merit is reduced up to 50%.
doi_str_mv 10.1016/j.tsf.2005.12.057
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subjects Hydrogen plasma
Solar cells
TCO
title Role of hydrogen plasma on electrical and optical properties of ZGO, ITO and IZO transparent and conductive coatings
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