Visualization of simulated coating efficiency and uniformity

For a line-of-sight coating uniformity model, the source distribution is normalized such that all material can be traced. This is validated for a point source in an empty coating chamber. We can now quantify the source utilization of a coating geometry to determine what fraction of the evaporated so...

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Bibliographische Detailangaben

Veröffentlicht in:	Applied optics (2004) 2023-03, Vol.62 (7), p.B14-B18
Hauptverfasser:	Tilsch, Markus Kurt, Nybank, Eric
Format:	Artikel
Sprache:	eng
Schlagworte:	Coating Lateral displacement Motion systems Nonuniformity Parameters
Online-Zugang:	Volltext
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