UV pulsed laser deposition from Al2O3–TiC ceramic composites

Ablation of Al2O3-TiC targets was performed in ultra high vacuum using a pulsed UV laser (KrF, 248 nm). The ablated material was collected onto Si(111) substrates to grow thin films. Two sets of experiments were performed with two different fluence values (6 and 15 J cm-2) and, for each set, three d...

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Veröffentlicht in:	Applied surface science 2003-03, Vol.208-209, p.522-526
Hauptverfasser:	Conde, O., Champeaux, C., Paramês, M.L., Catherinot, A., Vilar, R.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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