A novel pull-up type RF MEMS switch with low actuation voltage
We report a novel pull-up type radio frequency (RF) microelectromechanical system (MEMS) switch with no elastic deformation of the cantilever involved in the actuation. At a voltage of 4.5V, reliable actuations are achieved such that the movable lower contact pad is pulled up by the electrostatic fo...
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| Veröffentlicht in: | IEEE microwave and wireless components letters 2005-12, Vol.15 (12), p.856-858 |
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| container_issue | 12 |
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| container_title | IEEE microwave and wireless components letters |
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| creator | Seong-Dae Lee Byoung-Chul Jun Kim, S.-D. Jin-Koo Rhee |
| description | We report a novel pull-up type radio frequency (RF) microelectromechanical system (MEMS) switch with no elastic deformation of the cantilever involved in the actuation. At a voltage of 4.5V, reliable actuations are achieved such that the movable lower contact pad is pulled up by the electrostatic force to make contact with the upper pad. At a frequency of 50GHz, an insertion loss of 0.5dB, a return loss of 12.4dB, and an isolation of 55dB are obtained from the switch. The measured transient times for switch-on and switch-off are 120 and 130ns, respectively. Compared to the MEMS switches reported thus far, the pull-up type switch shows the best switching speed and isolation characteristic at 50GHz. |
| doi_str_mv | 10.1109/LMWC.2005.860006 |
| format | Article |
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At a voltage of 4.5V, reliable actuations are achieved such that the movable lower contact pad is pulled up by the electrostatic force to make contact with the upper pad. At a frequency of 50GHz, an insertion loss of 0.5dB, a return loss of 12.4dB, and an isolation of 55dB are obtained from the switch. The measured transient times for switch-on and switch-off are 120 and 130ns, respectively. Compared to the MEMS switches reported thus far, the pull-up type switch shows the best switching speed and isolation characteristic at 50GHz.</description><identifier>ISSN: 1531-1309</identifier><identifier>ISSN: 2771-957X</identifier><identifier>EISSN: 1558-1764</identifier><identifier>EISSN: 2771-9588</identifier><identifier>DOI: 10.1109/LMWC.2005.860006</identifier><identifier>CODEN: IMWCBJ</identifier><language>eng</language><publisher>New York, NY: IEEE</publisher><subject>Applied sciences ; Circuit properties ; Contacts ; Electric, optical and optoelectronic circuits ; Electronic circuits ; Electronics ; Electrostatic measurements ; Exact sciences and technology ; High isolation ; Insertion loss ; low actuation voltage ; Low voltage ; Micro- and nanoelectromechanical devices (mems/nems) ; microelectromechanical system (MEMS) switch ; Microelectromechanical systems ; Micromechanical devices ; Microswitches ; pull-up ; Radio frequency ; Radiofrequency microelectromechanical systems ; Semiconductor electronics. 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(IEEE) 2005</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c351t-c5682fb1ef87b33371907efb8f520b0b77658171be4b38c71612d79f9e5532d43</citedby><cites>FETCH-LOGICAL-c351t-c5682fb1ef87b33371907efb8f520b0b77658171be4b38c71612d79f9e5532d43</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/1549890$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,777,781,793,27905,27906,54739</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/1549890$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=17334642$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Seong-Dae Lee</creatorcontrib><creatorcontrib>Byoung-Chul Jun</creatorcontrib><creatorcontrib>Kim, S.-D.</creatorcontrib><creatorcontrib>Jin-Koo Rhee</creatorcontrib><title>A novel pull-up type RF MEMS switch with low actuation voltage</title><title>IEEE microwave and wireless components letters</title><addtitle>LMWC</addtitle><description>We report a novel pull-up type radio frequency (RF) microelectromechanical system (MEMS) switch with no elastic deformation of the cantilever involved in the actuation. At a voltage of 4.5V, reliable actuations are achieved such that the movable lower contact pad is pulled up by the electrostatic force to make contact with the upper pad. At a frequency of 50GHz, an insertion loss of 0.5dB, a return loss of 12.4dB, and an isolation of 55dB are obtained from the switch. The measured transient times for switch-on and switch-off are 120 and 130ns, respectively. Compared to the MEMS switches reported thus far, the pull-up type switch shows the best switching speed and isolation characteristic at 50GHz.</description><subject>Applied sciences</subject><subject>Circuit properties</subject><subject>Contacts</subject><subject>Electric, optical and optoelectronic circuits</subject><subject>Electronic circuits</subject><subject>Electronics</subject><subject>Electrostatic measurements</subject><subject>Exact sciences and technology</subject><subject>High isolation</subject><subject>Insertion loss</subject><subject>low actuation voltage</subject><subject>Low voltage</subject><subject>Micro- and nanoelectromechanical devices (mems/nems)</subject><subject>microelectromechanical system (MEMS) switch</subject><subject>Microelectromechanical systems</subject><subject>Micromechanical devices</subject><subject>Microswitches</subject><subject>pull-up</subject><subject>Radio frequency</subject><subject>Radiofrequency microelectromechanical systems</subject><subject>Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</subject><subject>Switches</subject><subject>Switching, multiplexing, switched capacity circuits</subject><issn>1531-1309</issn><issn>2771-957X</issn><issn>1558-1764</issn><issn>2771-9588</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2005</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNpdkEtLw0AQgIMoqNW74GUR9JY6s4_s5iJIaVVoEXzgcdlsN5qyTWI2aem_N7UFwcvMwHzz4IuiC4QhIqS309nHaEgBxFAlAJAcRCcohIpRJvxwWzOMkUF6HJ2GsABArjieRHf3pKxWzpO68z7uatJuakdeJmQ2nr2SsC5a-0X6-EV8tSbGtp1pi6okq8q35tOdRUe58cGd7_Mgep-M30aP8fT54Wl0P40tE9jGViSK5hm6XMmMMSYxBenyTOWCQgaZlIlQKDFzPGPKSkyQzmWap04IRuecDaKb3d66qb47F1q9LIJ13pvSVV3QVIFIOac9ePUPXFRdU_a_aaUYp7SX00Owg2xThdC4XNdNsTTNRiPorU29tam3NvXOZj9yvd9rgjU-b0xpi_A3Jxnjye_9yx1XOOf-2oKnKgX2A3WTen8</recordid><startdate>20051201</startdate><enddate>20051201</enddate><creator>Seong-Dae Lee</creator><creator>Byoung-Chul Jun</creator><creator>Kim, S.-D.</creator><creator>Jin-Koo Rhee</creator><general>IEEE</general><general>Institute of Electrical and Electronics Engineers</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>8FD</scope><scope>L7M</scope></search><sort><creationdate>20051201</creationdate><title>A novel pull-up type RF MEMS switch with low actuation voltage</title><author>Seong-Dae Lee ; Byoung-Chul Jun ; Kim, S.-D. ; Jin-Koo Rhee</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c351t-c5682fb1ef87b33371907efb8f520b0b77658171be4b38c71612d79f9e5532d43</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2005</creationdate><topic>Applied sciences</topic><topic>Circuit properties</topic><topic>Contacts</topic><topic>Electric, optical and optoelectronic circuits</topic><topic>Electronic circuits</topic><topic>Electronics</topic><topic>Electrostatic measurements</topic><topic>Exact sciences and technology</topic><topic>High isolation</topic><topic>Insertion loss</topic><topic>low actuation voltage</topic><topic>Low voltage</topic><topic>Micro- and nanoelectromechanical devices (mems/nems)</topic><topic>microelectromechanical system (MEMS) switch</topic><topic>Microelectromechanical systems</topic><topic>Micromechanical devices</topic><topic>Microswitches</topic><topic>pull-up</topic><topic>Radio frequency</topic><topic>Radiofrequency microelectromechanical systems</topic><topic>Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</topic><topic>Switches</topic><topic>Switching, multiplexing, switched capacity circuits</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Seong-Dae Lee</creatorcontrib><creatorcontrib>Byoung-Chul Jun</creatorcontrib><creatorcontrib>Kim, S.-D.</creatorcontrib><creatorcontrib>Jin-Koo Rhee</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>IEEE microwave and wireless components letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Seong-Dae Lee</au><au>Byoung-Chul Jun</au><au>Kim, S.-D.</au><au>Jin-Koo Rhee</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>A novel pull-up type RF MEMS switch with low actuation voltage</atitle><jtitle>IEEE microwave and wireless components letters</jtitle><stitle>LMWC</stitle><date>2005-12-01</date><risdate>2005</risdate><volume>15</volume><issue>12</issue><spage>856</spage><epage>858</epage><pages>856-858</pages><issn>1531-1309</issn><issn>2771-957X</issn><eissn>1558-1764</eissn><eissn>2771-9588</eissn><coden>IMWCBJ</coden><abstract>We report a novel pull-up type radio frequency (RF) microelectromechanical system (MEMS) switch with no elastic deformation of the cantilever involved in the actuation. At a voltage of 4.5V, reliable actuations are achieved such that the movable lower contact pad is pulled up by the electrostatic force to make contact with the upper pad. At a frequency of 50GHz, an insertion loss of 0.5dB, a return loss of 12.4dB, and an isolation of 55dB are obtained from the switch. The measured transient times for switch-on and switch-off are 120 and 130ns, respectively. Compared to the MEMS switches reported thus far, the pull-up type switch shows the best switching speed and isolation characteristic at 50GHz.</abstract><cop>New York, NY</cop><pub>IEEE</pub><doi>10.1109/LMWC.2005.860006</doi><tpages>3</tpages></addata></record> |
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| identifier | ISSN: 1531-1309 |
| ispartof | IEEE microwave and wireless components letters, 2005-12, Vol.15 (12), p.856-858 |
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| source | IEEE Electronic Library (IEL) |
| subjects | Applied sciences Circuit properties Contacts Electric, optical and optoelectronic circuits Electronic circuits Electronics Electrostatic measurements Exact sciences and technology High isolation Insertion loss low actuation voltage Low voltage Micro- and nanoelectromechanical devices (mems/nems) microelectromechanical system (MEMS) switch Microelectromechanical systems Micromechanical devices Microswitches pull-up Radio frequency Radiofrequency microelectromechanical systems Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Switches Switching, multiplexing, switched capacity circuits |
| title | A novel pull-up type RF MEMS switch with low actuation voltage |
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