Tribological studies of Zr-implanted PVD TiN coatings deposited on stainless steel substrates

TiN films deposited by a commercial physical vapour deposition (PVD) process were implanted with Zr ions at an energy of 40 keV and with doses ranging from 6×10 16 to 2×10 17 ions/cm 2. The films were characterised by glancing incident angle X-ray diffraction (GIXRD), optical microscopy and scanning...

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Veröffentlicht in:Wear 2003-04, Vol.254 (7), p.589-596
Hauptverfasser: Purushotham, K.P., Ward, Liam P., Brack, Narelle, Pigram, Paul J., Evans, Peter, Noorman, Hans, Manory, Rafael R.
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container_end_page 596
container_issue 7
container_start_page 589
container_title Wear
container_volume 254
creator Purushotham, K.P.
Ward, Liam P.
Brack, Narelle
Pigram, Paul J.
Evans, Peter
Noorman, Hans
Manory, Rafael R.
description TiN films deposited by a commercial physical vapour deposition (PVD) process were implanted with Zr ions at an energy of 40 keV and with doses ranging from 6×10 16 to 2×10 17 ions/cm 2. The films were characterised by glancing incident angle X-ray diffraction (GIXRD), optical microscopy and scanning electron microscopy (SEM). Friction and wear tests were carried out using a pin-on-disc tribometer with a 6 mm diameter ruby pin. The Zr ion implantation reduced the surface hardness, friction coefficient and wear. The friction coefficient was reduced for all doses compared with the untreated sample, but shows an optimum at a dose of 1×10 17 ions/cm 2. X-ray photoelectron spectroscopy (XPS) results show the formation in the implanted zone (IZ) of ZrN/TiZrN. X-ray diffraction (XRD) shows evidence of crystal damage, which increases with dose. Nanohardness results show that implantation causes softening of the IZ layer. The tribological behaviour is explained in view of these results.
doi_str_mv 10.1016/S0043-1648(03)00187-X
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source ScienceDirect Journals (5 years ago - present)
subjects Applied sciences
Contact of materials. Friction. Wear
Exact sciences and technology
Friction
Friction, wear, lubrication
Ion implantation
Machine components
Mechanical engineering. Machine design
Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology
Metals. Metallurgy
Nanohardness
Surface roughness
TiN coatings
Wear
X-ray diffraction
X-ray photoelectron spectroscopy
title Tribological studies of Zr-implanted PVD TiN coatings deposited on stainless steel substrates
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