Thermally driven micromechanical beam with piezoresistive deflection readout

This article reports on the fabrication and characterization of micromachined thermally driven micromechanical beam with piezoresistive readout for micro- and nanorobotic systems and advanced high speed scanning probe microscopy. The essential contribution of this paper is investigation of the actua...

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Veröffentlicht in:	Microelectronic engineering 2003-06, Vol.67, p.550-556
Hauptverfasser:	Ivanov, Tzv, Gotszalk, T., Grabiec, P., Tomerov, E., Rangelow, I.W.
Format:	Artikel
Sprache:	eng
Schlagworte:	Acoustic wave devices, piezoelectric and piezoresistive devices AFM Applied sciences Electronics Exact sciences and technology Piezoresistive cantilever Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Thermally driven cantilever
Online-Zugang:	Volltext
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