The effect of humidity on water sorption in photoresist polymer thin films

A quartz crystal microbalance technique has been utilized to measure water sorption and desorption in three photoresist polymers: poly( p-hydroxystyrene), novolac, and bis-triflouromethyl carbinol substituted poly(norbornene). The humidity of the sample environment was varied to determine the rate a...

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Veröffentlicht in:	Polymer (Guilford) 2003-03, Vol.44 (7), p.2101-2108
Hauptverfasser:	Berger, Cody M., Henderson, Clifford L.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Exact sciences and technology Miscellaneous Organic polymers Photoresist Physicochemistry of polymers Properties and characterization Quartz crystal microbalance Sorption
Online-Zugang:	Volltext
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