Design, analysis, and development of novel three-dimensional stacking WLCSP

A robust and rapid development procedure for a novel three-dimensional stacking wafer level chip-scaled packaging (3DS-WLCSP), emphasizing the finite-element parametric analysis and experimental validation, is disclosed herein. This design procedure is comprised of the fundamental validation of conv...

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Veröffentlicht in:IEEE transactions on advanced packaging 2005-08, Vol.28 (3), p.387-396
Hauptverfasser: Yuan, C.-A., Cheng Nan Han, Ming-Chih Yew, Chan-Yen Chou, Kou-Ning Chiang
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container_end_page 396
container_issue 3
container_start_page 387
container_title IEEE transactions on advanced packaging
container_volume 28
creator Yuan, C.-A.
Cheng Nan Han
Ming-Chih Yew
Chan-Yen Chou
Kou-Ning Chiang
description A robust and rapid development procedure for a novel three-dimensional stacking wafer level chip-scaled packaging (3DS-WLCSP), emphasizing the finite-element parametric analysis and experimental validation, is disclosed herein. This design procedure is comprised of the fundamental validation of conventional wafer-level chip-scaled packaging (WLCSP), design methodology development of the test vehicles and then the fabrication of the proposed 3DS-WLCSP structure. Based on the validation of the conventional WLCSP measurement and experiment, a reliable finite-element model can be achieved. However, in order to reduce the product design period, a simplified Glass-WLCSP is chosen as the test vehicle in the parametric design/validation procedure. Through the parametric analysis, one can obtain robust design parameters. Therefore, the proposed 3DS-WLCSP can be fabricated within the validated design parameters.
doi_str_mv 10.1109/TADVP.2005.852894
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source IEEE Electronic Library (IEL)
subjects Chip scale packaging
Design engineering
Design methodology
Design parameters
Fabrication
Factorial analysis
Finite element method
Finite element methods
Mathematical analysis
Packaging
Parametric analysis
Robustness
Semiconductor device measurement
Stacking
Test vehicles
Testing
three-dimensional (3-D) stacking
Vehicles
Wafer scale integration
wafer-level packaging
title Design, analysis, and development of novel three-dimensional stacking WLCSP
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