Study of plasma expansion induced by femtosecond pulsed laser ablation and deposition of diamond-like carbon films

Diamond-like carbon (DLC) films were deposited in high vacuum conditions at room temperature, by ablating graphite targets with femtosecond laser pulses. The structure of the films deposited onto silicon substrates were characterized by Raman spectroscopy and X-ray absorption near edge spectroscopy...

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Veröffentlicht in:	Applied surface science 2003-03, Vol.208, p.553-560
Hauptverfasser:	Loir, A.-S., Garrelie, F., Subtil, J.-L., Goutaland, F., Belin, M., Le Harzic, R., Donnet, C., Ouerdane, Y., Rogemond, F., Laporte, P.
Format:	Artikel
Sprache:	eng
Schlagworte:	DLC Plasma Pulsed laser deposition
Online-Zugang:	Volltext
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