Study of plasma expansion induced by femtosecond pulsed laser ablation and deposition of diamond-like carbon films
Diamond-like carbon (DLC) films were deposited in high vacuum conditions at room temperature, by ablating graphite targets with femtosecond laser pulses. The structure of the films deposited onto silicon substrates were characterized by Raman spectroscopy and X-ray absorption near edge spectroscopy...
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| Veröffentlicht in: | Applied surface science 2003-03, Vol.208, p.553-560 |
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| container_title | Applied surface science |
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| creator | Loir, A.-S. Garrelie, F. Subtil, J.-L. Goutaland, F. Belin, M. Le Harzic, R. Donnet, C. Ouerdane, Y. Rogemond, F. Laporte, P. |
| description | Diamond-like carbon (DLC) films were deposited in high vacuum conditions at room temperature, by ablating graphite targets with femtosecond laser pulses. The structure of the films deposited onto silicon substrates were characterized by Raman spectroscopy and X-ray absorption near edge spectroscopy (XANES). Films exhibit unusual structure, Raman spectra showing the presence of nanocrystalline diamond in amorphous matrix. Plasma plume was imaged by a gated ICCD camera in the UV-Visible range. The behavior of the plume shape as well as the kinetic energy of the particles are investigated. The behavior of the expansion dynamics of the plume and the properties of thin films are studied in order to determine the optimal growth conditions for femtosecond pulsed laser deposition of DLC films. |
| doi_str_mv | 10.1016/S0169-4332(02)01380-6 |
| format | Article |
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The structure of the films deposited onto silicon substrates were characterized by Raman spectroscopy and X-ray absorption near edge spectroscopy (XANES). Films exhibit unusual structure, Raman spectra showing the presence of nanocrystalline diamond in amorphous matrix. Plasma plume was imaged by a gated ICCD camera in the UV-Visible range. The behavior of the plume shape as well as the kinetic energy of the particles are investigated. 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| ispartof | Applied surface science, 2003-03, Vol.208, p.553-560 |
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| language | eng |
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| source | Elsevier ScienceDirect Journals Complete |
| subjects | DLC Plasma Pulsed laser deposition |
| title | Study of plasma expansion induced by femtosecond pulsed laser ablation and deposition of diamond-like carbon films |
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