Single-Phase Unidirectional Surface Acoustic Wave Transducer Using Cu Electrode

Paper proposes the application of Cu electrodes to surface acoustic wave single-phase unidirectional transducers (SAW SPUDTs). Since SPUDTs require large and widely variable reflectivity obtained by relatively thin electrodes, Cu with large mass density is one of the candidate materials. First, SAW...

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Veröffentlicht in:Japanese Journal of Applied Physics 2003, Vol.42 (Part 1, No. 5B), p.3152-3156
Hauptverfasser: Nakagomi, Sho, Asano, Hiroki, Tanaka, Hiroshi, Omori, Tatsuya, Hashimoto, Ken-ya, Yamaguchi, Masatsune
Format: Artikel
Sprache:eng
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