Local strain in SiGe/Si heterostructures analyzed by X-ray microdiffraction

We have investigated, using X-ray microdiffraction, local strain and crystalline texture in SiGe layers fabricated under various growth conditions on Si(001) substrates. Two-dimensional reciprocal space maps and contour maps in a series of the X-ray rocking curves were taken from the SiGe layers wit...

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Veröffentlicht in:	Thin solid films 2006-06, Vol.508 (1), p.128-131
Hauptverfasser:	Mochizuki, Shogo, Sakai, Akira, Taoka, Noriyuki, Nakatsuka, Osamu, Takeda, Shingo, Kimura, Shigeru, Ogawa, Masaki, Zaima, Shigeaki
Format:	Artikel
Sprache:	eng
Schlagworte:	Cross-disciplinary physics: materials science rheology Exact sciences and technology High resolution X-ray diffraction Materials science Methods of deposition of films and coatings film growth and epitaxy Molecular, atomic, ion, and chemical beam epitaxy Physics SiGe Strain X-ray microbeam
Online-Zugang:	Volltext
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