A pulse-operating electrostatic microactuator for bi-stable latching

We propose a novel microactuator with spade comb fingers designed for pulse-operating bi-stability. When the broad parts of the movable comb fingers are positioned facing the broad parts of the fixed comb fingers, the direction of electrostatic force is inward, like a conventional comb actuator. How...

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Veröffentlicht in:	Journal of micromechanics and microengineering 2005-08, Vol.15 (8), p.1511-1516
Hauptverfasser:	Kwon, Ho Nam, Hwang, Il-Han, Lee, Jong-Hyun
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Electronics Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Microelectronic fabrication (materials and surfaces technology) Micromechanical devices and systems Physics Precision engineering, watch making Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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