Micro-encoder based on higher-order diffracted light interference

A micro-encoder based on higher-order diffracted light interference has been developed for use in high-precision positioning. It uses plus/minus 3-order diffracted beams to obtain interference fringes for displacement detection and provides six signal periods for moving the scale grating by one grat...

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Veröffentlicht in:	Journal of micromechanics and microengineering 2005-08, Vol.15 (8), p.1459-1465
Hauptverfasser:	Higurashi, Eiji, Sawada, Renshi
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Electronics Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Microelectronic fabrication (materials and surfaces technology) Micromechanical devices and systems Physics Precision engineering, watch making Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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