Characterisation of engineered defects in extreme ultraviolet mirror substrates using lab-scale extreme ultraviolet reflection ptychography

Ptychography is a lensless imaging technique that is aberration-free and capable of imaging both the amplitude and the phase of radiation reflected or transmitted from an object using iterative algorithms. Working with extreme ultraviolet (EUV) light, ptychography can provide better resolution than...

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Veröffentlicht in:	Ultramicroscopy 2023-07, Vol.249, p.113720-113720, Article 113720
Hauptverfasser:	Lu, Haoyan, Odstrčil, Michal, Pooley, Charles, Biller, Jan, Mebonia, Mikheil, He, Guanze, Praeger, Matthew, Juschkin, Larissa, Frey, Jeremy, Brocklesby, William
Format:	Artikel
Sprache:	eng
Schlagworte:	EUV HHG Inspection Multilayer mirror Ptychography
Online-Zugang:	Volltext
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