Applications of UV-Raman Spectroscopy to Microelectronic Materials and Devices
Raman spectroscopy is a powerful technique for characterization of microelectronic materials and device structures. However, the commonly used visible Raman spectroscopy technique is severely limited in both lateral and depth resolution in applications to rapidly shrinking ULSI device structures. Th...
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Tagungsbericht |
| Sprache: | eng |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Schreiben Sie den ersten Kommentar!