New diamond turnable coatings of ternary systems for ultraprecision cutting

Moulding tools for optical components need optical surface quality. To reach this high quality surface the machining with monocrystalline diamond tools is most suitable. Steels which are used as materials for moulding tools are not diamond machinable due to heavy chemical wear of the diamond tool. T...

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Veröffentlicht in:	Surface & coatings technology 2003-09, Vol.174, p.973-978
Hauptverfasser:	Vennemann, A., Stock, H.-R., Kohlscheen, J., Vorgel, E., Mayr, P.
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemical wear Diamond tools Microcutting Reactive sputtering Substoichiometric composition Ti–Cu–N
Online-Zugang:	Volltext
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