Non-linear effects in Ta sputtering by Aum− ions
Emission of atomic and cluster ions of Tan+ (n=1-11) has been studied experimentally in sputtering of a Ta target by Aum- (m=1-9) cluster ions with energies of 6-21 keV. The high non-additive yield of the secondary ions under molecular bombardment has been observed. Increasing the number of atoms in...
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| Veröffentlicht in: | Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 2003-04, Vol.203 (Complete), p.192-197 |
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| container_title | Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms |
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| creator | Morozov, S.N. Rasulev, U.Kh |
| description | Emission of atomic and cluster ions of Tan+ (n=1-11) has been studied experimentally in sputtering of a Ta target by Aum- (m=1-9) cluster ions with energies of 6-21 keV. The high non-additive yield of the secondary ions under molecular bombardment has been observed. Increasing the number of atoms in the bombarding Aum- ions a substantial non-linear increase in the yield of atomic Ta+ ions with quasi-thermal energy has been found. The results obtained have proved experimentally the availability of thermal spikes under cluster bombardment. |
| doi_str_mv | 10.1016/S0168-583X(02)02216-4 |
| format | Article |
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| ispartof | Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 2003-04, Vol.203 (Complete), p.192-197 |
| issn | 0168-583X |
| language | eng |
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| source | Elsevier ScienceDirect Journals |
| title | Non-linear effects in Ta sputtering by Aum− ions |
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