Frictional Property of Zinc Oxide Coating Films Observed by Lateral Force Microscopy

Frictional Property of Zinc Oxide Coating Films Observed by Lateral Force Microscopy

ZnO coating films were synthesized by a magnetron sputter deposition method on stainless steel substrates. The crystal structure of the films was analyzed with XRD spectroscopy. Adhesion and frictional properties were obtained from force curves and lateral force data using AFM under an atmosphere an...

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Veröffentlicht in:Japanese Journal of Applied Physics 2003, Vol.42 (Part 1, No. 7B), p.4834-4836
Hauptverfasser: Goto, Masahiro, Kasahara, Akira, Konishi, Youko, Oishi, Tetsuo, Tosa, Masahiro, Yoshihara, Kazuhiro
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container_end_page 4836
container_issue Part 1, No. 7B
container_start_page 4834
container_title Japanese Journal of Applied Physics
container_volume 42
creator Goto, Masahiro
Kasahara, Akira
Konishi, Youko
Oishi, Tetsuo
Tosa, Masahiro
Yoshihara, Kazuhiro
description ZnO coating films were synthesized by a magnetron sputter deposition method on stainless steel substrates. The crystal structure of the films was analyzed with XRD spectroscopy. Adhesion and frictional properties were obtained from force curves and lateral force data using AFM under an atmosphere and in a vacuum. The friction coefficient decreased in spite of a marked increase in adhesion force on the film surface with heat treatment at 473 K in a vacuum. It was considered that the film surface energy changed during the heat treatment and affected the frictional properties of the films. 7 refs.
doi_str_mv 10.1143/JJAP.42.4834
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title Frictional Property of Zinc Oxide Coating Films Observed by Lateral Force Microscopy
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