Fabrication of nano-gap electrodes using electroplating technique

We report a simple and controllable method for fabricating a pair of electrodes with a sub-10-nm gap, namely nano-gap electrodes, by using a conventional electroplating technique. A pair of initial electrodes with a 100–200 nm gap is fabricated by electron beam lithography, and then gold is deposite...

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Veröffentlicht in:Thin solid films 2003-08, Vol.438 (Complete), p.317-321
Hauptverfasser: Kashimura, Yoshiaki, Nakashima, Hiroshi, Furukawa, Kazuaki, Torimitsu, Keiichi
Format: Artikel
Sprache:eng
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Zusammenfassung:We report a simple and controllable method for fabricating a pair of electrodes with a sub-10-nm gap, namely nano-gap electrodes, by using a conventional electroplating technique. A pair of initial electrodes with a 100–200 nm gap is fabricated by electron beam lithography, and then gold is deposited electrochemically to reduce this gap. A sub-10-nm gap is produced by halting the electroplating just before the electrodes make contact with each other. We also use our technique to fabricate nano-gap electrodes with a gold and a platinum finger, and with three gold fingers.
ISSN:0040-6090
1879-2731
DOI:10.1016/S0040-6090(03)00737-5