Detection of dilute nitrogen dioxide and thickness effect of tungsten oxide thin film sensors

WO3 thin film sensors have been fabricated by suspension dropping on SiO2/Si substrate equipped with Au microelectrodes, and subjected to the detection of dilute NO2 less than ppm level. The WO3 thin film with the thickness of ca. 0.6μm showed the extremely high sensitivity to dilute NO2 at 200°C (f...

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Veröffentlicht in:	Sensors and actuators. B, Chemical Chemical, 2003-10, Vol.95 (1-3), p.111-115
Hauptverfasser:	Tamaki, Jun, Hayashi, Atsushi, Yamamoto, Yoshifumi, Matsuoka, Masao
Format:	Artikel
Sprache:	eng
Schlagworte:	Nitrogen dioxide gas sensor Thickness effect Thin film Tungsten oxide
Online-Zugang:	Volltext
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