Design of Piezoresistive MEMS-Based Accelerometer for Integration with Wireless Sensing Unit for Structural Monitoring

The use of advanced embedded system technologies such as microelectromechanical system (MEMS) sensors and wireless communications hold great promise for measuring the response of civil structures to ambient and external disturbances. In this paper, the design of a high-performance, planar piezoresis...

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Veröffentlicht in:	Journal of aerospace engineering 2003-07, Vol.16 (3), p.108-114
Hauptverfasser:	Lynch, Jerome P, Partridge, Aaron, Law, Kincho H, Kenny, Thomas W, Kiremidjian, Anne S, Carryer, Ed
Format:	Artikel
Sprache:	eng
Schlagworte:	MEMS IN CIVIL ENGINEERING
Online-Zugang:	Volltext
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