Elemental thin film depth profiles by ion beam analysis using simulated annealing - a new tool

Rutherford backscattering spectrometry (RBS) and related techniques have long been used to determine the elemental depth profiles in films a few nanometres to a few microns thick. However, although obtaining spectra is very easy, solving the inverse problem of extracting the depth profiles from the...

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Veröffentlicht in:	Journal of physics. D, Applied physics Applied physics, 2003-04, Vol.36 (7), p.R97-R126
Hauptverfasser:	Jeynes, C, Barradas, N P, Marriott, P K, Boudreault, G, Jenkin, M, Wendler, E, Webb, R P
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Physics Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology
Online-Zugang:	Volltext
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