Comparison of diamond nucleation in DC and AC substrate bias mode

Diamond films were grown by modified hot filament (HF) CVD technique, employing the double bias configuration. Prior to the diamond growth, a voltage source was connected between the substrate and the filaments placed above the substrate to enhance the diamond nucleation. The influence of DC and AC...

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Veröffentlicht in:	Thin solid films 2003-06, Vol.433 (1), p.73-77
Hauptverfasser:	Kromka, A., Janı́k, J., Balon, F., Kubovič, M., Červeň, I., Dubravcová, V.
Format:	Artikel
Sprache:	eng
Schlagworte:	AC and DC bias nucleation Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.) Cross-disciplinary physics: materials science rheology Exact sciences and technology Hot filament CVD Materials science Methods of deposition of films and coatings film growth and epitaxy Physics Raman spectroscopy
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