Characterization of zirconium dioxide thin films prepared by cw CO2 laser-assisted evaporation

Zirconium dioxide thin films have been deposited by cw CO2 laser-assisted evaporation on Si(100), quartz and optically polished glass substrates at different substrate temperature. Films were grown in oxygen, under partial pressure. The surface morphology of the films has been observed by scanning e...

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Veröffentlicht in:	Indian journal of pure & applied physics 2003-05, Vol.41 (5), p.362-368
Hauptverfasser:	Choudhury M G M, Kao, J S, Lai, G R, Ali A G M R
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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