Changes in material properties of low- k interlayer dielectric polymers induced by exposure to plasmas

We have studied the effects of plasma treatments on the electrical, chemical and mechanical properties of fluorinated-poly-arylene-ether (FLARE) and divinylsiloxane-benzocyclobutane (BCB) polymers for use as low dielectric-constant ( k) interlayer dielectrics in complementary metal-oxide–Si (CMOS)....

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Veröffentlicht in:	Microelectronic engineering 2003-05, Vol.65 (4), p.463-477
Hauptverfasser:	Trabzon, L, Awadelkarim, O.O
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Divinylsiloxane-benzocyclobutane Electronics Exact sciences and technology Fluorinated-poly-arylene-ether Material properties Materials Plasma–polymer interaction
Online-Zugang:	Volltext
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