Site-Selective Chemical Vapor Deposition on Direct-Write 3D Nanoarchitectures

Recent advancements in additive manufacturing have enabled the preparation of free-shaped 3D objects with feature sizes down to and below the micrometer scale. Among the fabrication methods, focused electron beam- and focused ion beam-induced deposition (FEBID and FIBID, respectively) associate a hi...

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Veröffentlicht in:	ACS nano 2023-03, Vol.17 (5), p.4704-4715
Hauptverfasser:	Porrati, Fabrizio, Barth, Sven, Gazzadi, Gian Carlo, Frabboni, Stefano, Volkov, Oleksii M., Makarov, Denys, Huth, Michael
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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