Evaluation of a monolithic piezoelectric drive unit for a miniature robot

In this paper, the evaluation of two different piezoelectric drive units developed for motion generation in a miniature robot is presented. The miniature robot is intended for high precision manipulation of microscale objects. The drive units have six drive elements integrated monolithically and eac...

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Veröffentlicht in:	Sensors and actuators. A. Physical. 2002-09, Vol.101 (1), p.175-184
Hauptverfasser:	Simu, Urban, Johansson, Stefan
Format:	Artikel
Sprache:	eng
Schlagworte:	Acoustic wave devices, piezoelectric and piezoresistive devices Actuator Applied sciences Dielectric, ferroelectric, and piezoelectric devices Electronics Exact sciences and technology Fundamental areas of phenomenology (including applications) Manipulating Micro- and nanoelectromechanical devices (mems/nems) Miniature robot Motion Physics Piezoelectric Robotics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Solid dynamics (ballistics, collision, multibody system, stabilization...) Solid mechanics
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