3D OPC method for controlling the morphology of micro structures in laser direct writing

A 3D optical proximity correction (OPC) method for controlling the morphology of micro-structures in laser direct writing is proposed, considering both the optical proximity effect and nonlinear response of a thick-film photoresist. This method can improve the manufacturability and optical performan...

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Veröffentlicht in:	Optics express 2023-01, Vol.31 (2), p.3212-3226
Hauptverfasser:	Yang, Zeyu, Peng, Fei, Luan, Shiyi, Wan, Hui, Song, Yi, Gui, Chengqun
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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