Study of Microstructure in SrTiO3/Si by High-resolution Transmission Electron Microscopy

Microstructure in the SrTiO3/Si system has been studied using high-resolution transmission electron microscopy and image simulations. SrTiO3 grows heteroepitaxially on Si with the orientation relationship given by (001)STO//(001)Si and [100]STO//[110]Si. The lattice misfit between the SrTiO3 thin fi...

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Veröffentlicht in:	Journal of materials research 2002-01, Vol.17 (1), p.204-213
Hauptverfasser:	Yang, G. Y., Finder, J. M., Wang, J., Wang, Z. L., Yu, Z., Ramdani, J., Droopad, R., Eisenbeiser, K. W., Ramesh, R.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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