Superhard Ti–Si–N coatings by a hybrid system of arc ion plating and sputtering techniques

A new method for Ti–Si–N hard coatings, a hybrid coating system of arc ion plating (AIP) and sputtering techniques is introduced in this paper. Deposition behavior and mechanical properties of Ti–Si–N by the hybrid coating technique were investigated in this work. The Ti–Si–N coating layers were dep...

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Veröffentlicht in:	Surface & coatings technology 2002-12, Vol.161 (2), p.243-248
Hauptverfasser:	Kim, Kwang Ho, Choi, Sung-ryong, Yoon, Soon-young
Format:	Artikel
Sprache:	eng
Schlagworte:	Arc ion plating and sputtering Cross-disciplinary physics: materials science rheology Deposition by sputtering Exact sciences and technology Hybrid coating system Materials science Methods of deposition of films and coatings film growth and epitaxy Physics Superhardness Ti–Si–N
Online-Zugang:	Volltext
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