Review Composite and multilayer ferroelectric thin films: processing, properties and applications

This paper reviews recent developments in processing, properties and applications of composite and multilayer ferroelectric thin films. Methods such as physical vapor deposition, chemical vapor deposition and sol-gel, for the processing of composite and multilayer ferroelectric films are described....

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Veröffentlicht in:	Journal of materials science. Materials in electronics 2002-08, Vol.13 (8), p.439-459
Hauptverfasser:	Jayadevan, K P, Tseng, T Y
Format:	Artikel
Sprache:	eng
Schlagworte:	Ceramics Chemical vapor deposition Deposition Electronic devices Ferroelectric materials Ferroelectricity Multilayers Organic chemicals Process engineering Semiconductors Thin films
Online-Zugang:	Volltext
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