Erratum to : Effect of target material on deposition and properties of metal-containing DLC (Me-DLC) coatings

Metal containing diamond-like carbon (Me-DLC) coatings were prepared by magnetron sputter deposition using tungsten, tungsten carbide, niobium and titanium as target materials. An essential parameter for the process characterization is the target voltage. The substrate heating during the film growth...

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Veröffentlicht in:	Surface & coatings technology 2000-10, Vol.132 (2-3), p.275-283
Hauptverfasser:	BEWILOGUA, K, COOPER, C. V, SPECHT, C, SCHRÖDER, J, WITTORF, R, GRISCHKE, M
Format:	Artikel
Sprache:	eng
Schlagworte:	Cross-disciplinary physics: materials science rheology Deposition by sputtering Exact sciences and technology Materials science Methods of deposition of films and coatings film growth and epitaxy Physics
Online-Zugang:	Volltext
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